sims Secondary Ion Mass Spectrometry
The incoming ion sputters atomic and molecular particles from the surface. A few of the sputtered particles will be ions. These ions (secondary ions) are analyzed in a mass spectrometer |
msri Mass Spectrometry of Recoiled Ions
The incoming ion has a direct and hard collision with some particles close to the surface (black), whereby a much larger amount of the incident ion's energy is transferred. Hence, this direct recoil ion has much higher energies as in the case of sims. It can reach the mass spectrometer even in poor vacuum.
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